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[Manufacturing Results] Manual Operation Device

A case where manual operations such as valve opening and closing in the vacuum drying process of the semiconductor industry can be controlled via a touch panel!

We would like to introduce our achievements in modifying the operation and control system of a "manual operation device" for the precision parts manufacturing industry. We added a PLC control system to enable manual operations such as valve opening and closing via a touch panel, and implemented various interlocks. The modifications included changing manual valves to pneumatic valves, adding a vacuum gauge, introducing interlocks related to exhaust, pressure, and gas, and implementing an automatic exhaust mode (from DP + TMP startup to chamber exhaust). 【Overview of Achievements】 ■ Modification Details - Modified manual operation parts such as valve opening and closing to be operable via a touch panel. - Introduced various interlocks made possible by the addition of the PLC. ■ Modification Areas - Changed manual valves to pneumatic valves and added a vacuum gauge. ■ Control/Operation: PLC/Touch Panel *For more details, please refer to the related links or feel free to contact us.